Cu+ ions extraction of the modified Bernas ion source

Gas ion implanter using Duopigatron ion sources has been used to improve surface properties of the material at PEFP(Proton Engineering Frontier Project). Gas ion implanter is limited to ion species such as feeding gases. Bernas ion source with heating elements is adopted to use heavy ions like metal...

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Bibliographic Details
Main Author: Trịnh, Thị Tú Anh
Format: Conference object
Language:Vietnamese
Published: 2023
Online Access:http://scholar.dlu.edu.vn/handle/123456789/1669
https://inis.iaea.org/search/search.aspx?orig_q=RN:39109338
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Institutions: Thư viện Trường Đại học Đà Lạt