Cu+ ions extraction of the modified Bernas ion source
Gas ion implanter using Duopigatron ion sources has been used to improve surface properties of the material at PEFP(Proton Engineering Frontier Project). Gas ion implanter is limited to ion species such as feeding gases. Bernas ion source with heating elements is adopted to use heavy ions like metal...
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מחבר ראשי: | |
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פורמט: | Conference object |
שפה: | Vietnamese |
יצא לאור: |
2023
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גישה מקוונת: | http://scholar.dlu.edu.vn/handle/123456789/1669 https://inis.iaea.org/search/search.aspx?orig_q=RN:39109338 |
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Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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