Cu+ ions extraction of the modified Bernas ion source

Gas ion implanter using Duopigatron ion sources has been used to improve surface properties of the material at PEFP(Proton Engineering Frontier Project). Gas ion implanter is limited to ion species such as feeding gases. Bernas ion source with heating elements is adopted to use heavy ions like metal...

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書誌詳細
第一著者: Trịnh, Thị Tú Anh
フォーマット: Conference object
言語:Vietnamese
出版事項: 2023
オンライン・アクセス:http://scholar.dlu.edu.vn/handle/123456789/1669
https://inis.iaea.org/search/search.aspx?orig_q=RN:39109338
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