Cu+ ions extraction of the modified Bernas ion source

Gas ion implanter using Duopigatron ion sources has been used to improve surface properties of the material at PEFP(Proton Engineering Frontier Project). Gas ion implanter is limited to ion species such as feeding gases. Bernas ion source with heating elements is adopted to use heavy ions like metal...

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Detalhes bibliográficos
Autor principal: Trịnh, Thị Tú Anh
Formato: Conference object
Idioma:Vietnamese
Publicado em: 2023
Acesso em linha:http://scholar.dlu.edu.vn/handle/123456789/1669
https://inis.iaea.org/search/search.aspx?orig_q=RN:39109338
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