Cu+ ions extraction of the modified Bernas ion source

Gas ion implanter using Duopigatron ion sources has been used to improve surface properties of the material at PEFP(Proton Engineering Frontier Project). Gas ion implanter is limited to ion species such as feeding gases. Bernas ion source with heating elements is adopted to use heavy ions like metal...

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主要作者: Trịnh, Thị Tú Anh
格式: Conference object
语言:Vietnamese
出版: 2023
在线阅读:http://scholar.dlu.edu.vn/handle/123456789/1669
https://inis.iaea.org/search/search.aspx?orig_q=RN:39109338
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