Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films
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| Định dạng: | Bài viết |
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| Ngôn ngữ: | Vietnamese |
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2023
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| Truy cập trực tuyến: | https://sti.vista.gov.vn/tw/Pages/tai-lieu-khcn.aspx?ItemID=289777 https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/127565 |
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oai:scholar.dlu.edu.vn:DLU123456789-1275652023-11-11T22:32:14Z Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films Science and Technology Development Journal 2023-09-14T00:53:21Z 2023-09-14T00:53:21Z 2019 Article https://sti.vista.gov.vn/tw/Pages/tai-lieu-khcn.aspx?ItemID=289777 https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/127565 vi Science and Technology Development Journal - 2019 - no.4 application/pdf |
| institution |
Thư viện Trường Đại học Đà Lạt |
| collection |
Thư viện số |
| language |
Vietnamese |
| topic |
Science and Technology Development Journal |
| spellingShingle |
Science and Technology Development Journal Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| format |
Article |
| title |
Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| title_short |
Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| title_full |
Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| title_fullStr |
Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| title_full_unstemmed |
Design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| title_sort |
design of magnetron co-sputtering configuration for preparing magnesium tin silicide-based thermoelectric alloy thin films |
| publishDate |
2023 |
| url |
https://sti.vista.gov.vn/tw/Pages/tai-lieu-khcn.aspx?ItemID=289777 https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/127565 |
| _version_ |
1819801752775426048 |