Introduction to Microsystem Design
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not req...
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| Định dạng: | Sách |
| Ngôn ngữ: | English |
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Springer
2015
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| Truy cập trực tuyến: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/59064 |
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oai:scholar.dlu.edu.vn:DLU123456789-590642023-11-11T06:29:11Z Introduction to Microsystem Design Schomburg, Werner Karl Nanotechnology Microengineering Optical Electronic Materials This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book. 2015-11-03T01:42:23Z 2015-11-03T01:42:23Z 2015 Book 978-3-662-47023-7 https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/59064 en application/pdf Springer |
| institution |
Thư viện Trường Đại học Đà Lạt |
| collection |
Thư viện số |
| language |
English |
| topic |
Nanotechnology Microengineering Optical Electronic Materials |
| spellingShingle |
Nanotechnology Microengineering Optical Electronic Materials Schomburg, Werner Karl Introduction to Microsystem Design |
| description |
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book. |
| format |
Book |
| author |
Schomburg, Werner Karl |
| author_facet |
Schomburg, Werner Karl |
| author_sort |
Schomburg, Werner Karl |
| title |
Introduction to Microsystem Design |
| title_short |
Introduction to Microsystem Design |
| title_full |
Introduction to Microsystem Design |
| title_fullStr |
Introduction to Microsystem Design |
| title_full_unstemmed |
Introduction to Microsystem Design |
| title_sort |
introduction to microsystem design |
| publisher |
Springer |
| publishDate |
2015 |
| url |
https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/59064 |
| _version_ |
1782549148469297152 |