Scaling issues and design of MEMS

Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest...

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Bibliographic Details
Main Author: Baglio, Salvatore
Format: Book
Language:Undetermined
Published: Chichester, England John Wiley & Sons 2007
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Institutions: Trung tâm Học liệu Trường Đại học Cần Thơ