Scaling issues and design of MEMS

Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest...

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Détails bibliographiques
Auteur principal: Baglio, Salvatore
Format: Livre
Langue:Undetermined
Publié: Chichester, England John Wiley & Sons 2007
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