Scaling issues and design of MEMS

Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest...

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Detalhes bibliográficos
Autor principal: Baglio, Salvatore
Formato: Livro
Idioma:Undetermined
Publicado em: Chichester, England John Wiley & Sons 2007
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