Principles of plasma discharges and materials processing

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, in...

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Detalhes bibliográficos
Autor principal: Lieberman, M. A.
Formato: Livro
Idioma:Undetermined
Publicado em: Hoboken, N.J. Wiley-Interscience 2005
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ
Descrição
Resumo:The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters.