Principles of plasma discharges and materials processing

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, in...

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Bibliographische Detailangaben
1. Verfasser: Lieberman, M. A.
Format: Buch
Sprache:Undetermined
Veröffentlicht: Hoboken, N.J. Wiley-Interscience 2005
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