Beam technologies for integrated processing : Report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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| Formato: | Livro |
|---|---|
| Idioma: | Undetermined |
| Publicado em: |
Washington
National Academy Press
1992
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
|---|
| LEADER | 00739nam a2200181Ia 4500 | ||
|---|---|---|---|
| 001 | CTU_98796 | ||
| 008 | 210402s9999 xx 000 0 und d | ||
| 082 | |a 621.381 | ||
| 082 | |b B366 | ||
| 245 | 0 | |a Beam technologies for integrated processing : | |
| 245 | 0 | |b Report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. | |
| 260 | |a Washington | ||
| 260 | |b National Academy Press | ||
| 260 | |c 1992 | ||
| 650 | |a Microelectronics industry,Molecular beams | ||
| 650 | |x Industrial applications | ||
| 904 | |i Tuyến | ||
| 980 | |a Trung tâm Học liệu Trường Đại học Cần Thơ | ||