Application of femtosecond laser ablation time-of-flight mass spectrometry to in-depth multilayer analysis /

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Xehetasun bibliografikoak
Egile nagusia:	Margetic, Vanja.
Beste egile batzuk:	Hergenroder, Roland., Niemax, Kay.
Formatua:	Artikulua
Hizkuntza:	English
Gaiak:	Laser ablation technique Mass spectrometry Multilayer Silicon Thin films
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Application of femtosecond laser ablation time-of-flight mass spectrometry to in-depth multilayer analysis /

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