Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Bibliographische Detailangaben
Weitere Verfasser:	Gillen, Greg., Roberson, Sonya., Savage, Nancy Ortins., Semancik, Steve., Tarlov, Michael J.
Format:	Artikel
Sprache:	English
Schlagworte:	Chemical sensor Iron oxide Lithography Secondary ion mass spectrometry Sensor array Sol gel process Thin film Tin oxide
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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