Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Dettagli Bibliografici
Altri autori:	Gillen, Greg., Roberson, Sonya., Savage, Nancy Ortins., Semancik, Steve., Tarlov, Michael J.
Natura:	Articolo
Lingua:	English
Soggetti:	Chemical sensor Iron oxide Lithography Secondary ion mass spectrometry Sensor array Sol gel process Thin film Tin oxide
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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