Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Thermolithographic patterning of sol-gel metal oxides on micro hot plate sensing arrays using organosilanes /

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Bibliografiska uppgifter
Övriga upphovsmän:	Gillen, Greg., Roberson, Sonya., Savage, Nancy Ortins., Semancik, Steve., Tarlov, Michael J.
Materialtyp:	Artikel
Språk:	English
Ämnen:	Chemical sensor Iron oxide Lithography Secondary ion mass spectrometry Sensor array Sol gel process Thin film Tin oxide
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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