Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates
Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...
محفوظ في:
| المؤلف الرئيسي: | |
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| اللغة: | eng |
| منشور في: |
Osaka University,
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| الوصول للمادة أونلاين: | https://dlib.udn.vn/module/chi-tiet-sach?RecordID=2767 |
| الوسوم: |
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| Thư viện lưu trữ: | Trung tâm Công nghệ thông tin và Học liệu số, Đại học Đà Nẵng |
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| الملخص: | Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ... |
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