Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates
Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...
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Osaka University,
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https:--dlib.udn.vn-module-chi-tiet-sach?RecordID=27672025-04-21T00:00:00ZDinh Thanh KhanMulti-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates周期溝加工テンプレート上エピタキシャルAlN厚膜のマルチスケール結晶構造評価Đặc trưng nhiều thang đo của các tính chất tinh thể học trong các màng dầy AIN trồng trên các đế được tạo lối rãnhOsaka University,Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...engUniversity of Education - The University of Dananghttps://dlib.udn.vn/module/chi-tiet-sach?RecordID=2767 |
| institution |
Trung tâm Công nghệ thông tin và Học liệu số, Đại học Đà Nẵng |
| collection |
DSpace |
| language |
eng |
| description |
Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ... |
| author |
Dinh Thanh Khan |
| spellingShingle |
Dinh Thanh Khan Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| author_facet |
Dinh Thanh Khan |
| author_sort |
Dinh Thanh Khan |
| title |
Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| title_short |
Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| title_full |
Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| title_fullStr |
Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| title_full_unstemmed |
Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| title_sort |
multi-scale characterization of crystalline properties in thick aln epitaxial films grown on trench-patterned templates |
| publisher |
Osaka University, |
| url |
https://dlib.udn.vn/module/chi-tiet-sach?RecordID=2767 |
| _version_ |
1848657395885015040 |