Instrumentation for Measurement of the Energy Distribution of the RF Implanter

A microbeam production using the RF implanter at PEFP is in progress for research in material science. For this purpose, the energy spread of the beam less than 1% is required. A beam focusing system with a triplet quardrupole has been adopted. In order to measure the energy spread, we have dev...

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Autor principal: Trịnh, Thị Tú Anh
Format: Conference object
Idioma:Vietnamese
Publicat: 2023
Accés en línia:http://scholar.dlu.edu.vn/handle/123456789/1662
https://www.kns.org/files/pre_paper/7/536Tu%20Anh%20Trinh.pdf
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