The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter
Proton Engineering Frontier Project (PEFP) has supplied the metal ions to users by using an installed metal ion implanter of 120 keV. At present a feasibility study is being performed for a cobalt ion implantation. For a cobalt ion extraction we studied to sustain the high temperature($648^{\circ}C$...
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| Định dạng: | Journal article |
| Ngôn ngữ: | Vietnamese |
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2023
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oai:scholar.dlu.edu.vn:123456789-16682023-01-04T09:58:13Z The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter Trịnh, Thị Tú Anh $Co^+$; Bernas ion source; Metal ion implanter; RBS analysis; Proton Engineering Frontier Project (PEFP) has supplied the metal ions to users by using an installed metal ion implanter of 120 keV. At present a feasibility study is being performed for a cobalt ion implantation. For a cobalt ion extraction we studied to sustain the high temperature($648^{\circ}C$) for metal ions vaporization from a cobalt chloride powder by using an alumina crucible in the ion source. The temperature condition of the crucible was satisfied with the plasma generation at the arc current of 120V and EHC power of 250W. The extracted beam current of $Co^+$ ions was dependent on the arc current in the plasma. The maximum beam current was $100{\mu}A$ at 0.18A of the arc current. The 3 peak currents of the extracted ions such as $Co^+$, $CoCl^+$ and $Cl^+$ were obtained by adjusting a mass analyzing magnet and the $Co^+$ ion beam peak current fraction as around 70% in the sum of the peak currents. The fluence of the implanted cobalt ions at the $10{\mu}A$ of the beam current and 90 minutes of the implantation time into an aluminum sample as measured around $1.74{\times}10^{17}#/cm^2$ by a quantitative analysis method of RBS (Rutherford Backscattering Spectrometry). 18 3 236-243 2023-01-03T06:48:44Z 2023-01-03T06:48:44Z 2009 Journal article Bài báo đăng trên tạp chí quốc tế (có ISSN), bao gồm book chapter http://scholar.dlu.edu.vn/handle/123456789/1668 10.5757/JKVS.2009.18.3.236 vi Journal of the Korean Vacuum Society |
| institution |
Thư viện Trường Đại học Đà Lạt |
| collection |
Thư viện số |
| language |
Vietnamese |
| topic |
$Co^+$; Bernas ion source; Metal ion implanter; RBS analysis; |
| spellingShingle |
$Co^+$; Bernas ion source; Metal ion implanter; RBS analysis; Trịnh, Thị Tú Anh The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| description |
Proton Engineering Frontier Project (PEFP) has supplied the metal ions to users by using an installed metal ion implanter of 120 keV. At present a feasibility study is being performed for a cobalt ion implantation. For a cobalt ion extraction we studied to sustain the high temperature($648^{\circ}C$) for metal ions vaporization from a cobalt chloride powder by using an alumina crucible in the ion source. The temperature condition of the crucible was satisfied with the plasma generation at the arc current of 120V and EHC power of 250W. The extracted beam current of $Co^+$ ions was dependent on the arc current in the plasma. The maximum beam current was $100{\mu}A$ at 0.18A of the arc current. The 3 peak currents of the extracted ions such as $Co^+$, $CoCl^+$ and $Cl^+$ were obtained by adjusting a mass analyzing magnet and the $Co^+$ ion beam peak current fraction as around 70% in the sum of the peak currents. The fluence of the implanted cobalt ions at the $10{\mu}A$ of the beam current and 90 minutes of the implantation time into an aluminum sample as measured around $1.74{\times}10^{17}#/cm^2$ by a quantitative analysis method of RBS (Rutherford Backscattering Spectrometry). |
| format |
Journal article |
| author |
Trịnh, Thị Tú Anh |
| author_facet |
Trịnh, Thị Tú Anh |
| author_sort |
Trịnh, Thị Tú Anh |
| title |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| title_short |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| title_full |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| title_fullStr |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| title_full_unstemmed |
The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter |
| title_sort |
characteristic study on the extraction of a co ion in the metal ion implanter |
| publishDate |
2023 |
| url |
http://scholar.dlu.edu.vn/handle/123456789/1668 |
| _version_ |
1768306230408773632 |