The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter

Proton Engineering Frontier Project (PEFP) has supplied the metal ions to users by using an installed metal ion implanter of 120 keV. At present a feasibility study is being performed for a cobalt ion implantation. For a cobalt ion extraction we studied to sustain the high temperature($648^{\circ}C$...

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Bibliographic Details
Main Author: Trịnh, Thị Tú Anh
Format: Journal article
Language:Vietnamese
Published: 2023
Subjects:
Online Access:http://scholar.dlu.edu.vn/handle/123456789/1668
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Institutions: Thư viện Trường Đại học Đà Lạt