Low energy ion assisted film growth
This is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy...
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| Format: | Knjiga |
| Jezik: | Undetermined |
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Singapore
Imperial college press
2003
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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