Low energy ion assisted film growth

This is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy...

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Hlavní autor: González-Elipe, A. R.
Médium: Kniha
Jazyk:Undetermined
Vydáno: Singapore Imperial college press 2003
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ