Low energy ion assisted film growth

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Low energy ion assisted film growth

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This is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy...

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Bibliographic Details
Main Author:	González-Elipe, A. R.
Format:	Book
Language:	Undetermined
Published:	Singapore Imperial college press 2003
Subjects:	Particles (Nuclear physics),Ion exchange,Hạt (vật lý hạt nhân),Biến đổi Ion
Tags:	Add Tag No Tags, Be the first to tag this record!

Institutions:	Trung tâm Học liệu Trường Đại học Cần Thơ

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