Handbook of thin-film deposition processes and techniques :

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Handbook of thin-film deposition processes and techniques : Principles, methods, equipment, and applications

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Detalhes bibliográficos
Formato:	Livro
Idioma:	Undetermined
Publicado em:	Norwich, N.Y. Noyes Publications 2002
Assuntos:	Hơi hóa chất lắng đọng,Chemical vapor deposition
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Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Cần Thơ


LEADER	00672nam a2200205Ia 4500
001	CTU_237206
008	210402s9999 xx 000 0 und d
082			\|a 621.38152
082			\|b H236
245		0	\|a Handbook of thin-film deposition processes and techniques :
245		0	\|b Principles, methods, equipment, and applications
245		0	\|c Edited by Krishna Seshan.
260			\|a Norwich, N.Y.
260			\|b Noyes Publications
260			\|c 2002
526			\|a Vật lý màng mỏng
526			\|b TN399
650			\|a Hơi hóa chất lắng đọng,Chemical vapor deposition
910			\|a Tuyến
980			\|a Trung tâm Học liệu Trường Đại học Cần Thơ