A two-step micromirror for low voltage operation /

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Dades bibliogràfiques
Altres autors:	Han, Seungoh., Hwang, Yong-Ha., Kim, Jae-Soon., Lee, Byung-Kab., Pak, James Jungho.
Format:	Article
Idioma:	English
Matèries:	Low driving voltage Moving plate Surface micromachining technology Two-step micromirror
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A two-step micromirror for low voltage operation /

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