A study of the curvature of a thick ALN film grown on a trench-patterned α-Al2O3 template using X-ray diffraction
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| Thư viện lưu trữ: | Trung tâm Công nghệ thông tin và Học liệu số, Đại học Đà Nẵng |
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Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates
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প্রকাশিত: (2023)