CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER
An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a cr...
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| Định dạng: | Journal article |
| Ngôn ngữ: | Vietnamese |
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2023
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| Truy cập trực tuyến: | http://scholar.dlu.edu.vn/handle/123456789/1666 |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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oai:scholar.dlu.edu.vn:123456789-16662023-01-04T10:04:34Z CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER Trịnh, Thị Tú Anh Ion Source; Copper; Metal Chloride; Ion Implanter; An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a crucible temperature in excess of $350^{\circ}C$. Stable extraction of the ions is possible for arc Currents less than 0.3 A. Arc currents increase with the induced power of a block cathode and the transverse field in the ion source. $Cu^+$ ions in the extracted beam are separated using a dipole magnet. A $20{\mu}A$ $Cu^+$ ion current can be extracted with a 0.2 A arc current. The ion current can support a dose of $10^{16}ions/cm^2$ over an area of $15\;cm^2$ within a few hours. 41 5 709-714 2023-01-03T06:44:10Z 2023-01-03T06:44:10Z 2009 Journal article Bài báo đăng trên tạp chí quốc tế (có ISSN), bao gồm book chapter http://scholar.dlu.edu.vn/handle/123456789/1666 10.5516/NET.2009.41.5.709 vi Nuclear Engineering and Technology |
| institution |
Thư viện Trường Đại học Đà Lạt |
| collection |
Thư viện số |
| language |
Vietnamese |
| topic |
Ion Source; Copper; Metal Chloride; Ion Implanter; |
| spellingShingle |
Ion Source; Copper; Metal Chloride; Ion Implanter; Trịnh, Thị Tú Anh CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| description |
An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a crucible temperature in excess of $350^{\circ}C$. Stable extraction of the ions is possible for arc Currents less than 0.3 A. Arc currents increase with the induced power of a block cathode and the transverse field in the ion source. $Cu^+$ ions in the extracted beam are separated using a dipole magnet. A $20{\mu}A$ $Cu^+$ ion current can be extracted with a 0.2 A arc current. The ion current can support a dose of $10^{16}ions/cm^2$ over an area of $15\;cm^2$ within a few hours. |
| format |
Journal article |
| author |
Trịnh, Thị Tú Anh |
| author_facet |
Trịnh, Thị Tú Anh |
| author_sort |
Trịnh, Thị Tú Anh |
| title |
CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| title_short |
CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| title_full |
CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| title_fullStr |
CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| title_full_unstemmed |
CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER |
| title_sort |
cu+ ion extraction from a modified bernas ion source in a metal-ion implanter |
| publishDate |
2023 |
| url |
http://scholar.dlu.edu.vn/handle/123456789/1666 |
| _version_ |
1768306229720907776 |