CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER

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CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER

An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a cr...

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Tác giả chính:	Trịnh, Thị Tú Anh
Định dạng:	Journal article
Ngôn ngữ:	Vietnamese
Được phát hành:	2023
Những chủ đề:	Ion Source; Copper; Metal Chloride; Ion Implanter;
Truy cập trực tuyến:	http://scholar.dlu.edu.vn/handle/123456789/1666
Các nhãn:	Thêm thẻ Không có thẻ, Là người đầu tiên thẻ bản ghi này!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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