MEMS/MOEMS packaging : Concepts, designs, materials, and processes
While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the prote...
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| Format: | Book |
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New York
Mcgraw-hill
2005
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| Institutions: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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