Fundamentals of semiconductor fabrication /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book (Paper) |
| Published: |
New York :
Wiley,
c2004.
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| Edition: | Wiley international ed. |
| Subjects: | |
| Online Access: | Table of contents Contributor biographical information Publisher description |
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| Institutions: | Thư viện Trường Đại học Đà Lạt |
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| Physical Description: | xiii, 305 p. : ill. ; 26 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471232793 |