Fundamentals of semiconductor manufacturing and process control

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to bo...

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Bibliografische gegevens
Hoofdauteur: May, Gary S.
Formaat: Boek
Taal:Undetermined
Gepubliceerd in: Hoboken, N.J. Wiley-Interscience 2006
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