MEMS/MOEMS packaging : concepts, designs, materials, and processes /
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| Main Author: | |
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| Format: | Book (Paper) |
| Published: |
New York :
McGraw-Hill,
c2005.
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| Series: | McGraw-Hill nanoscience and technology series
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| Subjects: | |
| Online Access: | Table of contents only Table of contents only Contributor biographical information Publisher description |
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| Institutions: | Thư viện Trường Đại học Đà Lạt |
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| Physical Description: | xiii, 220 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references (p. 203-213) and index. |
| ISBN: | 0071455566 |