Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Detaylı Bibliyografya
Yazar:	So, Soon-Youl.
Materyal Türü:	Makale
Dil:	English
Konular:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
Etiketler:	Etiketle Etiket eklenmemiş, İlk siz ekleyin!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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