Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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書目詳細資料
主要作者:	So, Soon-Youl.
格式:	Bài viết
語言:	English
主題:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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