Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

Wedi'i Gadw mewn:

Manylion Llyfryddiaeth
Prif Awdur:	So, Soon-Youl.
Fformat:	Erthygl
Iaith:	English
Pynciau:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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