Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Bibliografske podrobnosti
Glavni avtor:	So, Soon-Youl.
Format:	Bài viết
Jezik:	English
Teme:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
Oznake:	Označite Brez oznak, prvi označite!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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