Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Simulations of capacitively coupled plasmas between unequal-sized powered and grounded electrodes using one- and two-dimensional fluid models /

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Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	So, Soon-Youl.
Μορφή:	Άρθρο
Γλώσσα:	English
Θέματα:	Asymmetric geometry DC self-bias voltage Fluid model RF plasmas
Ετικέτες:	Προσθήκη ετικέτας Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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