Analysis and calibration of transient enhanced diffusion for indium impurity in nanoscale semiconductor devices /

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Analysis and calibration of transient enhanced diffusion for indium impurity in nanoscale semiconductor devices /

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Bibliographische Detailangaben
1. Verfasser:	Lee, Jun-Ha.
Weitere Verfasser:	Lee, Hoong-Joo.
Format:	Artikel
Sprache:	English
Schlagworte:	Calibration Indium impurity Nanoscale Transient enhanced diffusion
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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