Amorphization of silicon by 250 keV electron irradiation and hydrogen annealing /

Antzeko izenburuak

• Relationship between secondary electrom emissions and film thickness of hydrogenated amorphous silicon /
• Amorphous silicon and related materials
  nork: Fritzsche, Hellmut
  Argitaratua: (1989)
• Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /
  nork: Kim, Young-Min.
• Multimode detection of hydrogen gas using palladium-covered silicon micro-channels /
• On the effect of the amorphous silicon microstructure on the grain size of solid phase crystallized polycrystalline silicon /