Kỹ thuật chế tạo màng mỏng

Bao gồm bảy chương, trình bày về các kỹ thuật chế tạo màng từ pha dung dịch và pha hơi. Bao gồm các phương pháp như mạ điện, sol-gel, lắng đọng hơi hóa học (CVD), lắng đọng lớp nguyên tử (ALD), bốc bay nhiệt, bốc bay chùm điện tử, lắng đọng...

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Bibliographic Details
Main Author:	Vũ, Thị Hạnh Thu
Other Authors:	Đại học Quốc gia Tp. Hồ Chí Minh
Format:	Book
Language:	Undetermined
Published:	Tp. Hồ Chí Minh Đại học Quốc gia Tp. Hồ Chí Minh 2014
Subjects:	Vật liệu màng mỏng > Chế tạo; Kỹ thuật chế tạo vật liệu > Vật liệu màng mỏng; Vật lý > Trạng thái vật chất > Màng mỏng
Online Access:	http://lrc.tdmu.edu.vn/opac/search/detail.asp?aID=2&ID=24211
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Institutions:	Trung tâm Học liệu Trường Đại học Thủ Dầu Một

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http://lrc.tdmu.edu.vn/opac/search/detail.asp?aID=2&ID=24211

Kỹ thuật chế tạo màng mỏng

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