Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates
Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...
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| Jazyk: | eng |
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Osaka University,
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| On-line přístup: | https://dlib.udn.vn/module/chi-tiet-sach?RecordID=2767 |
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