Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates

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Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates

Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...

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Bibliografiske detaljer
Hovedforfatter:	Dinh Thanh Khan
Sprog:	eng
Udgivet:	Osaka University,
Online adgang:	https://dlib.udn.vn/module/chi-tiet-sach?RecordID=2767
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Thư viện lưu trữ:	Trung tâm Công nghệ thông tin và Học liệu số, Đại học Đà Nẵng

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A study of the curvature of a thick ALN film grown on a trench-patterned α-Al2O3 template using X-ray diffraction

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