CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER
An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a cr...
Wedi'i Gadw mewn:
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| Fformat: | Journal article |
| Iaith: | Vietnamese |
| Cyhoeddwyd: |
2023
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| Pynciau: | |
| Mynediad Ar-lein: | http://scholar.dlu.edu.vn/handle/123456789/1666 |
| Tagiau: |
Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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