CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER
An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a cr...
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| Main Author: | |
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| Format: | Journal article |
| Language: | Vietnamese |
| Published: |
2023
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| Subjects: | |
| Online Access: | http://scholar.dlu.edu.vn/handle/123456789/1666 |
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| Institutions: | Thư viện Trường Đại học Đà Lạt |
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