Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
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| Hlavní autoři: | , , |
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| Médium: | Kniha |
| Jazyk: | English |
| Vydáno: |
Noyes Publications
2011
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| Témata: | |
| On-line přístup: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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| Shrnutí: | This book provides a perspective look at a range of thin film plasma processing technologies. |
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