Remote hydrogen-nitrogen plasma chemical vapor deposition from a tetramethyldisilazane source. Part 1. Mechanism of the process, structure and surface morphology of deposited amorphous hydrogenated silicon carbonitride films /

Đã lưu trong:
Sonraí Bibleagrafaíochta
Údair Eile: Aoki, T., Baszczyk, I., Hatanaka, Y., Klemberg-Sapieha, J. E., Tracz, A., Walkiewicz-Pietrzykowska, A., Wrobel, A. M.
Formáid: Bài viết
Teanga:English
Ábhair:
Clibeanna: Cuir Clib Leis
Gan Chlibeanna, Bí ar an gcéad duine leis an taifead seo a chlibeáil!
Thư viện lưu trữ: Thư viện Trường Đại học Đà Lạt