Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
Enregistré dans:
| Auteurs principaux: | , , |
|---|---|
| Format: | Livre |
| Langue: | English |
| Publié: |
Noyes Publications
2011
|
| Sujets: | |
| Accès en ligne: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
|---|
| Résumé: | This book provides a perspective look at a range of thin film plasma processing technologies. |
|---|