Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

This book provides a perspective look at a range of thin film plasma processing technologies.

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awduron: Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D.
Fformat: Llyfr
Iaith:English
Cyhoeddwyd: Noyes Publications 2011
Pynciau:
Mynediad Ar-lein:https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172
Tagiau: Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
Thư viện lưu trữ: Thư viện Trường Đại học Đà Lạt