Handbook of semiconductor manufacturing technology
New to the second edition of this reference are sections on silicon-on-insulator (SOI) materials and devices, supercritical CO2 in semiconductor cleaning, low-'5f dielectrics, atomic-layer deposition, Damascene copper electroplating, and effects of terrestrial radiation on integrated circuits....
Guardat en:
| Autor principal: | |
|---|---|
| Format: | Llibre |
| Idioma: | Undetermined |
| Publicat: |
Boca Raton
CRC Press
2008
|
| Matèries: | |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|
| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
|---|