Handbook of semiconductor manufacturing technology

New to the second edition of this reference are sections on silicon-on-insulator (SOI) materials and devices, supercritical CO2 in semiconductor cleaning, low-'5f dielectrics, atomic-layer deposition, Damascene copper electroplating, and effects of terrestrial radiation on integrated circuits....

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Detalles Bibliográficos
Autor principal: Doering, Robert
Formato: Libro
Lenguaje:Undetermined
Publicado: Boca Raton CRC Press 2008
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