Handbook of semiconductor manufacturing technology
New to the second edition of this reference are sections on silicon-on-insulator (SOI) materials and devices, supercritical CO2 in semiconductor cleaning, low-'5f dielectrics, atomic-layer deposition, Damascene copper electroplating, and effects of terrestrial radiation on integrated circuits....
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| Hoofdauteur: | |
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| Formaat: | Boek |
| Taal: | Undetermined |
| Gepubliceerd in: |
Boca Raton
CRC Press
2008
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| Onderwerpen: | |
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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