Handbook of semiconductor manufacturing technology
New to the second edition of this reference are sections on silicon-on-insulator (SOI) materials and devices, supercritical CO2 in semiconductor cleaning, low-'5f dielectrics, atomic-layer deposition, Damascene copper electroplating, and effects of terrestrial radiation on integrated circuits....
Đã lưu trong:
| 主要作者: | Doering, Robert |
|---|---|
| 格式: | 圖書 |
| 語言: | Undetermined |
| 出版: |
Boca Raton
CRC Press
2008
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| 主題: | |
| 標簽: |
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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