Fundamentals of semiconductor fabrication
This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, sili...
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| Fformat: | Llyfr |
| Iaith: | Undetermined |
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New York
Wiley
2004
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| Pynciau: | |
| Tagiau: |
Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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| LEADER | 01016nam a2200217Ia 4500 | ||
|---|---|---|---|
| 001 | CTU_152275 | ||
| 008 | 210402s9999 xx 000 0 und d | ||
| 020 | |c 116.25 | ||
| 082 | |a 621.38152 | ||
| 082 | |b M466 | ||
| 100 | |a May, Gary S. | ||
| 245 | 0 | |a Fundamentals of semiconductor fabrication | |
| 245 | 0 | |c Gary S. May, Simon M. Sze | |
| 260 | |a New York | ||
| 260 | |b Wiley | ||
| 260 | |c 2004 | ||
| 520 | |a This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film depositio | ||
| 650 | |a Semiconductors,Bán dẫn | ||
| 650 | |x Design and construction,Thiết kế xây dựng | ||
| 904 | |i Phương Kiều | ||
| 980 | |a Trung tâm Học liệu Trường Đại học Cần Thơ | ||