The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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Bibliographische Detailangaben
1. Verfasser:	Park, Tae Gyu.
Weitere Verfasser:	Han, Dong Chul., Yang, Sang Sik.
Format:	Artikel
Sprache:	English
Schlagworte:	Anisotropic etching Boundary layer Etching characteristics Megasonic agitation
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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