The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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Opis bibliograficzny
1. autor:	Park, Tae Gyu.
Kolejni autorzy:	Han, Dong Chul., Yang, Sang Sik.
Format:	Artykuł
Język:	English
Hasła przedmiotowe:	Anisotropic etching Boundary layer Etching characteristics Megasonic agitation
Etykiety:	Dodaj etykietę Nie ma etykietki, Dołącz pierwszą etykiete!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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