The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

Đã lưu trong:

Sonraí Bibleagrafaíochta
Príomhúdar:	Park, Tae Gyu.
Údair Eile:	Han, Dong Chul., Yang, Sang Sik.
Formáid:	Bài viết
Teanga:	English
Ábhair:	Anisotropic etching Boundary layer Etching characteristics Megasonic agitation
Clibeanna:	Cuir Clib Leis Gan Chlibeanna, Bí ar an gcéad duine leis an taifead seo a chlibeáil!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

Míreanna Comhchosúla

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