The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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The fabrication of megasonic agitated module (mam) for the improved characteristics of wet etching /

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Autore principale:	Park, Tae Gyu.
Altri autori:	Han, Dong Chul., Yang, Sang Sik.
Natura:	Articolo
Lingua:	English
Soggetti:	Anisotropic etching Boundary layer Etching characteristics Megasonic agitation
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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