The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter

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The Characteristic Study on the Extraction of a Co Ion in the Metal Ion Implanter

Proton Engineering Frontier Project (PEFP) has supplied the metal ions to users by using an installed metal ion implanter of 120 keV. At present a feasibility study is being performed for a cobalt ion implantation. For a cobalt ion extraction we studied to sustain the high temperature($648^{\circ}C$...

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Autore principale:	Trịnh, Thị Tú Anh
Natura:	Journal article
Lingua:	Vietnamese
Pubblicazione:	2023
Soggetti:	$Co^+$; Bernas ion source; Metal ion implanter; RBS analysis;
Accesso online:	http://scholar.dlu.edu.vn/handle/123456789/1668
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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